Hafnium Oxide Nanolaminates

An XPS study of the initial stages of oxidation of hafnium ...

An XPS study of the initial stages of oxidation of hafnium. ... HfO2/TiO2 nanolaminates by atomic layer deposition ... aqueous-based hafnium oxide hydroxide ...

G213 0013-4651/2005/1523 ALD of Hafnium Oxide .

ALD of Hafnium Oxide Thin Films from Tetrakis—ethylmethylamino–hafnium and Ozone Xinye Liu,a,z Sasangan Ramanathan,a Ana Longdergan,a Anuranjan Srivastava,a

Optimization of hafnium oxide for use in nanoparticle .

In this work we investigate the dielectric properties of hafnium oxide deposited by RF magnetron sputtering with ... Soft breakdown in irradiated high-κ nanolaminates:

JOURNAL - Jiyoung Kim's Research Group - Google Sites

191. Heesoo Kang, Bhaswar Chakrabarti, Jie Huang, Ning Lu, Tae Joo Park, Moon J. Kim, Jiyoung Kim, Eric M. Vogel, Jungdal Choi, Jeong-Hyuk Choi, Chilhee Chung ...

Atomic layer deposited nanolaminates of HfO2/ZrO2 .

Atomic layer deposited nanolaminates of HfO2/ZrO2 films ... 7129553 Lanthanide oxide/hafnium oxide ... 7728626 Memory utilizing oxide nanolaminates ...

Brevetto US6013553 - Zirconium and/or hafnium .

Method to form zirconium oxide and hafnium oxide for high dielectric constant materials: US6495474 * ... Nanolaminates of hafnium oxide and zirconium oxide: US8163403:

براءة الاختراع US20070181931 - Hafnium tantalum oxide ...

A dielectric layer containing a hafnium tantalum oxide film and a method of fabricating such a dielectric layer produce a dielectric layer for use in a variety of ...

Implementing Alternating Nanolaminates in .

Nanolaminates in Trenched Energy ... hafnium oxide (HfO 2), aluminum oxide (Al 2O ... using ultrathin oxide layers or nanolaminates can

A novel biosensor based on hafnium oxide: Application .

Read "A novel biosensor based on hafnium oxide: Application for early stage detection of human interleukin-10, Sensors and Actuators B: Chemical" on DeepDyve, the ...

Hafnium Oxide Nanolaminates

Patent US20050277256 - Nanolaminates of hafnium oxide . A dielectric film containing a HfO2/ZrO2 nanolaminate and a method of fabricating such a dielectric film ...

Patent US20050277256 - Nanolaminates of hafnium oxide and ...

1. An electronic device comprising: a dielectric film including a nanolaminate having a layer of hafnium oxide and a layer of zirconium oxide, the nanolaminate having ...

Patent US6020024 - Method for forming high dielectric ...

Method for forming high dielectric constant metal oxides US 6020024 A. ... (ZrO 2), hafnium oxide ... Nanolaminates of hafnium oxide and zirconium oxide:

Patent US6627503 - Method of forming a multilayer ...

A multilayer dielectric stack is provided which has alternating layers of a high-k material and an ... Nanolaminates of hafnium oxide and zirconium oxide:

Патент US20060008966 - Memory utilizing oxide .

Structures, systems and methods for floating gate transistors utilizing oxide-conductor nanolaminates are provided. One floating gate transistor embodiment includes a ...

hafnium oxide nanolaminates

Surface morphology and crystallinity control in the._ 2012912-Nanolaminates of hafnium, zirconium and aluminum oxide were also .

Atomic Layer Deposition, Characterization, and Dielectric ...

Atomic Layer Deposition, Characterization, and Dielectric Properties of ... Nanolaminates of ... Rashid Bashir, Silicon Nanowires with High-k Hafnium Oxide ...

ERIS - Eesti teadus- ja arendustegevuse infosüsteem

Dielectric oxide nanolaminates deposited by atomic layer epitaxy. Kukli ... Properties of hafnium oxide films grown by atomic layer deposition from hafnium ...

Perforated pitting prevention of 316L stainless steel ...

Perforated pitting prevention of 316L stainless steel using hafnium dioxide-aluminum oxide nanolaminate films: ... and HfO2-Al2O 3 nanolaminates are examined.

Patent US7728626 - Memory utilizing oxide nanolaminates

Structures, systems and methods for transistors utilizing oxide nanolaminates are provided. One transistor embodiment includes a first source/drain region, a second ...

Hafnium tantalum oxide dielectrics

A dielectric layer containing a hafnium tantalum oxide film and a method of fabricating such a dielectric layer produce a dielectric layer for use in a variety of ...

A novel biosensor based on hafnium oxide: Application .

Read "A novel biosensor based on hafnium oxide: Application for early stage detection of human interleukin-10, Sensors and Actuators B: Chemical" on DeepDyve, the ...

Surface morphology and crystallinity control in the .

Surface morphology and crystallinity control in the atomic ... Nanolaminates of hafnium, ... A single hafnium oxide or aluminum oxide layer was introduced ...

Tailoring the dielectric properties of HfO2–Ta2O5 ...

The nanolaminates were evaluated in capacitance and current–voltage ... The gas sensing properties of hafnium oxide thin films depending on the annealing ...

Patent US6921702 - Atomic layer deposited nanolaminates .

A dielectric film containing HfO2/ZrO2 nanolaminates and a method of fabricating such a dielectric film produce a reliable gate dielectric having an equivalent oxide ...

Patent US6420279 - Methods of using atomic layer ...

Methods of forming hafnium oxide, zirconium oxide and nanolaminates of hafnium oxide and zirconium oxide are provided. These methods utilize atomic layer deposition ...

Atomic Layer Deposition, Characterization, and Dielectric ...

Atomic Layer Deposition, Characterization, and Dielectric Properties of HfO2 ... Nanolaminates of HfO2 and SiO2 ... Atomic Layer Deposition of Hafnium Oxide ...

Atomic layer deposited nanolaminates of hfo2/zro2 .

Title: Atomic layer deposited nanolaminates of hfo2/zro2 films as gate dielectrics. Abstract: A dielectric film containing a nanolaminate with a hafnium oxide layer ...

Oxides Group Publications | The Rowland Institute at .

Oxides Group Publications ... Atomic layer deposition of Y2O3/ZrO2 nanolaminates: ... Higher permittivity rare earth doped hafnium oxide for sub-45nm Metal ...

Patente US20060252211 - ATOMIC LAYER DEPOSITED ...

A dielectric film containing a nanolaminate with a hafnium oxide layer and a zirconium oxide layer and a method of fabricating such a dielectric film produce a ...

Patent US6930059 - Method for depositing a .

The method employs a nitrate ligand in a first precursor as an oxidizer for a second precursor to form the oxide nanolaminates. Using a hafnium nitrate precursor and ...

Atomic Layer Deposition, Characterization, and Dielectric ...

Atomic Layer Deposition, Characterization, and Dielectric Properties of HfO2 ... Nanolaminates of HfO2 and SiO2 ... Atomic Layer Deposition of Hafnium Oxide ...

Patent US6921702 - Atomic layer deposited nanolaminates .

A dielectric film containing HfO 2 /ZrO 2 nanolaminates and a method of fabricating such a dielectric film produce a reliable gate dielectric having an equivalent ...

Patent US7049192 - Lanthanide oxide / hafnium oxide ...

Forming a layer of hafnium oxide by chemical vapor deposition and forming a layer of a ... Lanthanide oxide / hafnium oxide ... including nanolaminates, ...